Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi

Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi

INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE

Yazarlar: Erman ERDOĞAN, Mutlu KUNDAKÇI

Cilt 7 , Sayı 2 , 2018 , Sayfalar 1013 - 1022

Konular:Malzeme Bilimleri, Ortak Disiplinler

DOI:10.28948/ngumuh.445524

Anahtar Kelimeler:III-V compounds,Sputtering,Nitroggas flow,Physical characteristics,Thin films

Özet: In this research work, InGaN (Indium Gallium Nitride) triple compound was grown under different N2 gas flow rates by using sputtering technique. The structural, optical and morphological characteristics of the InGaN compound have been studied in detail. In the XRD analysis, films exhibited hexagonal crystal structure. The films appear at lower wavelengths in visible region and absorption values begin to increase sharply from about 550-560 nm and reach the highest absorption value in the Near-UV region. When gas flow rates increased, the optical band gaps of the film increased. In SEM, the film exhibits dense coverage of the material on the surface of the substrate without the presence of voids, pinholes or cracks. In the results of the AFM, there are locally peaks and valleys, and partially homogeneous and circular-like clusters are arranged. Films are suitable structures for use in device applications.

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@article{2018, title={INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE}, volume={7}, number={2}, publisher={Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi}, author={Erman ERDOĞAN,Mutlu KUNDAKÇI}, year={2018}, pages={1013–1022} }
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Erman ERDOĞAN,Mutlu KUNDAKÇI. (2018). INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE (Vol. 7, pp. 1013–1022). Vol. 7, pp. 1013–1022. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi.
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Erman ERDOĞAN,Mutlu KUNDAKÇI. INVESTIGATION OF THE EFFECT OF N2 GAS FLOW RATE ON THE OPTICAL, STRUCTURAL AND MORPHOLOGICAL PROPERTIES OF INDIUM-GALLIUM-NITRIDE TRIPLE THIN FILMS OBTAINED BY SPUTTER TECHNIQUE. no. 2, Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, 2018, pp. 1013–22.
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